Busy Times Ahead
Thursday, August 10, 2017
There has been much activity over the past few months, which has kept us busy. Many more activities will be taking place in the near future.
Thanks to the Transformative Quantum Technologies program under Prof. David Cory (PI), the fab and thus our entire lab member community will soon benefit from several new system acquisitions.
- JEOL JSM-7200F Scanning Electron Microscope (SEM)
- Heidelberg MLA150 maskless aligner/exposure system
- Bruker Dimension FastScan Scanning Probe Microscope (SPM)
- New stylus profilometer (Bruker DektakXT)
- Tousimis critical point dryer (installed and soon to be released for use)
- Additional cassettes and pre-alignment microscope for existing JEOL JBX-6300FS e-beam litho system
Thanks to TQT support, we have also renovated lab QNC 1707 adjacent to the existing cleanroom to make it into a characterization lab, which will house the new SEM and SPM. This lab will also house existing systems such as electrical probe stations and other characterization systems thus making more room available in the cleanroom for new process equipment.
TQT has also enabled the renovation of the old RAC1 cleanroom, which will soon house new capabilities. These will fall under the Quantum NanoFab’s scope of responsibilities and will thus be accessible to our entire lab member community. Details on these capabilities will be shared in future communications.
These multiple new equipment installations will be commencing later this month and will continue throughout the fall and early winter. The entire fab team will thus be busier than usual. Fab operations will also be disrupted at times as the required renovations take place and the new tools are brought into the fab. We will do our best to keep these disruptions to an absolute minimum and will provide ample notice whenever possible.
The community’s usual patience and understanding will be greatly appreciated as these exciting projects gain momentum in the near future. Thank you.